I haven't been in school for a while, so I'm not sure what's current. I really liked Baker's book - CMOS circuit design. It had a decent overview of the manufacturing process for the perspective of a designer, as well as good introductions to major design topics.
Unfortunately, with modern processes, most of the textbook design equations and learning no longer apply so it becomes as much learning an art as it is science.
I think the Baker book is good for an overview. I also used Pierret's Semiconductor Device Fundamentals in undergrad. It goes more in depth for device physics than it is a pure manufacturing text, but I recall it also had a nice overview.
I haven't been in school for a while, so I'm not sure what's current. I really liked Baker's book - CMOS circuit design. It had a decent overview of the manufacturing process for the perspective of a designer, as well as good introductions to major design topics.
Unfortunately, with modern processes, most of the textbook design equations and learning no longer apply so it becomes as much learning an art as it is science.