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by kayson
1686 days ago
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I think the Baker book is good for an overview. I also used Pierret's Semiconductor Device Fundamentals in undergrad. It goes more in depth for device physics than it is a pure manufacturing text, but I recall it also had a nice overview. |
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And Weste http://pages.hmc.edu/harris/cmosvlsi/4e/index.html
are both very good. Weste is used in more Universities but it also has a digital slant to it.