[lordnacho]

Both. Ah I think I might have had that book until my parents' basement flooded.

Yeah of course when it comes to how things are actually done it's hard to know without actually working in the field. But I just wanted an overview.

[kayson]

I think the Baker book is good for an overview. I also used Pierret's Semiconductor Device Fundamentals in undergrad. It goes more in depth for device physics than it is a pure manufacturing text, but I recall it also had a nice overview.

[zsmi]

Baker http://cmosedu.com

And Weste http://pages.hmc.edu/harris/cmosvlsi/4e/index.html

are both very good. Weste is used in more Universities but it also has a digital slant to it.