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RandomLensman
25 days ago
The laser and optics for the EUV light source are from the US?
1 comments
chuckadams
25 days ago
The laser is from the US, the optics are German (Zeiss)
link
RandomLensman
25 days ago
Isn't TRUMPF a German company?
link
petcat
25 days ago
OP was slightly mistaken. The laser itself is provided by TRUMPF, a German company. Cymer (USA) integrates that laser with tin droplet, plasma, optical, vacuum, and control technologies to create the complete DUV/EUV light sources.
link