Im really not convinced that can be solved with money alone. China has the money and infrastructure, they don’t have the chips. Europe doesn’t have the infrastructure or the money but may have some chips
But the actually valuable EUV light source technology is developed by Cymer in California. Cymer was only permitted to be acquired by ASML in 2014 under a strict technology sharing and export agreement with US government.
It's why ASML can't just sell the machines to whomever they want. It's largely American tech inside them.