[Someone]

High-NA EUV, apparently. https://www.reuters.com/business/asml-says-next-gen-euv-tool...:

- ASML's High-NA EUV machines ready for high-volume production

- Machines have processed 500,000 wafers, showing technical readiness

- Full integration into manufacturing expected in 2-3 years, ASML's CTO says

After that, it may be X-rays.

A disruptive step would be to move to 3D printing, but that (among other issues) is too slow at the moment. Maybe, ideas from nano robotics (https://en.wikipedia.org/wiki/Nanorobotics) can help there.

[q3k]

> A disruptive step would be to move to 3D printing

The lithography equivalents of that are laser direct write lithography and e-beam lithography. They've been used for decades in research labs, but they're impossibly slow for any mass production.

Atomic Semi are trying to make some derivative of these processes happen at a commercial scale.

[mytailorisrich]

Nvidia's latest Rubin architecture has 336 billion transistors, and there are ~10 per wafer.

Even leaving size aside, I don't think that there are any credible way to 3D print something that complex.

Lithography enables that level of complexity because each layer is done in one go. I think any alternative technologies would have that property, too.