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by Panoramix
92 days ago
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It's about the thermal conductivity. Helium has 150mW/mK vs Argon ~18mW/mK so you can't replace it. The only alternatives to Helium are Neon, which is 3x worse and much more expensive, and hydrogen. However, hydrogen is flammable so it's a very bad idea to use it in a fab which has extremely poisonous gases and needs a cleanroom environment. A fire would ruin your whole factory and kill your engineers. |
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