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by chasil 227 days ago
Japan has also made some strides in this area, reported here a few months ago.

"Professor Shintake aligned two axis-symmetric mirrors in a straight line and used a total of only four mirrors instead of ten.

"Because highly absorbent EUV light weakens by 40% with each reflection, only about 1% of the energy from the light source reaches the wafer when bounced off ten mirrors while more than 10% does when only four mirrors are used."

https://asiatimes.com/2024/08/japan-on-edge-of-euv-lithograp...

Edit: "Substrate said that it has developed a version of lithography that uses X-ray light."

2 comments

IBM also worked on X-ray lithography

https://ieeexplore.ieee.org/document/5389640

"X-ray light" sound a bit like beer soda.
"X-ray" is just a word for light that falls within an arbitrary band of wavelength.
Yes, but so are radio waves and gamma rays; it would still sound odd to hear somebody say "radio light" or "gamma light".
I think you have it backwards - light is a term used for specific bands of the EM spectrum. Nobody is calling their FM radio waves light emissions. Unless this is a naming collison with the already established x-rays.
It's an established term in physics. E.g., https://lightsources.org/
Everybody says "ultraviolet light" even though it's invisible.
Not all light is visible.
Right, hence "visible light". So I don't see the problem with saying x-ray light either.