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by ycui1986
236 days ago
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If anything, the most complicated problem in lithography is not EUV at all. The hardest problem is the overlay mismatch. ASML had spent decades minimizing overlay mismatch. A new player in semiconductor may claim to master EUV, or X-Ray or contact printing, but everyone must solve the overlay mismatch problem. That is no more easier than the EUV part. |
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