Intel didn't cancel any fabs in Arizona, one just came online. They killed plans Fabs in Poland and Germany, and the Ohio fab is on hold. You don't get the money up front, so nothing to give back.
I doubt there was much; the sort of outright subsidy the US sometimes does is usually classed as unlawful state aid in the EU (there are exceptions; in particular member states were allowed to bail out/nationalise their banks in the financial crisis. But subsidies to random foreign companies would generally be illegal; see the Apple tax case).
But I guess that's a risk they knew they were taking.