> This is the power consumed by the light source for one photo tool on one line.
Actually, it’s not if you read the linked article. Try harder with your indignant reply next time to an entirely factual post. Sheesh!
Further, here’s a >one hundred megawatt generator installation (yes, used, but it’s always call for quote otherwise online) for a small fraction of the price of the EUV machine in case I need to further prove my point.
There’s also multiple GE LMS100 generators installed in Texas and they each provide ~115MW of power. So not unprecedented for installation in the state either!
> For example, a lot of that 1.3 MW went into cooling the system and handling the hydrogen flow used to prevent contamination build up.