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by hengheng
462 days ago
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EUV has always been about achieving high enough power to be economically viable. It was never about making chips at any cost. I remember reading the tinfoil hat theory about three-letter agencies making low-quantity high-cost chips at incredible process sizes in order to break encryption. I doubt that's still as viable today as it was before leakage currents started dominating, but it was an impressively plausible theory. |
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IIRC EUV development picked plasma over synchrotron because plasma projected to be cheaper, even though technically synchrotron had more benefits. Queue many, many years of solving for technical challenges for LPP and now commercialized EUV machines cost 200m, 400m for next high NA. Which is about the cost of multiple small or single medium size synchrotron facility. It's amazing plasma EUV works, but it's also a failure in the sense that it is FAR less economical than originally envisioned, which explains why particle accelerator route is still being worked on.