|
|
|
|
|
|
by monocasa
452 days ago
|
|
|
They tried both in the initial design phase, there's upsides and downsides, but ultimately thought that the tin droplet laser was more liekly to actually get done more or less on the time schedule requested, and so that's where the bulk of the capital went. Interestingly China has been continuing working on the synchotron based EUV litho idea (in addition to work to create domestically built tin laser EUV lithos machines). https://www.nature.com/articles/s41598-022-07323-z |
|
|