Glass has a tensile strength more than an order of magnitude below mono-Si. The elastic modulus for soda-lime is within a factor of 2, but that's not usually what is meant by "strength", rather "stiffness".
You're right that fracture toughness is comparable, but that's not usually as relevant in a MEMS context: for one thing there's less potential for unanticipated collisions, but also crack propagation is significantly inhibited at microscopic length scales.
You're right that fracture toughness is comparable, but that's not usually as relevant in a MEMS context: for one thing there's less potential for unanticipated collisions, but also crack propagation is significantly inhibited at microscopic length scales.