[amirhirsch]

Thanks for your notes! I've only worked with solid state lasers that are pretty efficient and would have figured 10% aught to be possible for a CPA from wallplug to multi-terrawatt beam. I'm not sure how losses would go in the chirp pulse amplifier, plasma or FEL stages though.

I think we could afford a 10^-6 wall power to EUV beam loss and still be economical probably not 10^-8... my rough estimate is that for your 100W EUV beam equivalent to what ASML provides you can afford to burn on the order of 100MW for four years and still use less dollars to pay for that power than the capital expenditure for your ASML EUV system.