Absolutely. What makes a lot of sense for one organization would be absolutely insane for others. ASML has incredible innovation in some areas but I'd expect them to prioritize stability in others.
Honestly, if you think about the availability guarantees that these FAB's have to deliver, I'm kinda surprised they don't run off of IBM mainframes. Can't believe it but it would be a perfect use case. High bandwidth I/O, paired with ungodly, over-the-horizon-radar like availability.