[formerly_proven]

Canon "exited" the race earlier than that. Canon makes KrF scanners, but chose not to pursue ArF scanners. Nikon and ASML did pursue ArF (which were introduced late 90s/early 2000s), later Nikon chose to not pursue EUV scanners, leaving only ASML in that market.

[formerly_proven]

Oh and just to clarify, by "Nikon chose to not pursue EUV" I of course mean "the US made sure the japs can't access the relevant technology because they were market leaders at the time".

[rjzzleep]

Do you have in references for the US involvement in Nikon's decision to drop EUV?

[formerly_proven]

https://brie.berkeley.edu/sites/default/files/wp118.pdf