[mjevans]

It might help you to look up https://en.wikipedia.org/wiki/Mimeograph and possibly other copying techniques. More approachable examples include CD / DVD https://en.wikipedia.org/wiki/Compact_disc_manufacturing or earlier vinyl record production methods.

For the case of chip lithography they'd probably make source masks, copy the first generation a time or two, and use those secondary source masks to produce consumable 'stamps' for production.

Hopefully the stamps maintain sufficient quality across at least a couple batches (50-100+?) of wafers.

[jacquesm]

I highly doubt it will be that much initially. Silicon is pretty hard.

[phire]

The stamp doesn't touch the silicon or any other solid material, it hovers just above.

It only touches a liquid photo-resist that is spread on the wafer. The stamp is transparent, which allows UV light to shine though and exposes the photo-resist, which solidifies into a mask matching the stamp.

[jacquesm]

Ah ok! I thought the two were actually in contact. Ok, in that case they might get some life out of them.