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by oldesthacker
915 days ago
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Interesting bit about Samsung’s secret sauce: Samsung went even smaller than Intel, showing results for 48-nm and 45-nm contacted poly pitch (CPP), compared to Intel’s 60 nm, though these were for individual devices, not complete inverters. Although there was some performance degradation in the smaller of Samsung’s two prototype CFETs, it wasn’t much, and the company’s researchers believe manufacturing process optimization will take care of it. Crucial to Samsung’s success was the ability to electrically isolate the sources and drains of the stacked pFET and nFET devices. Without adequate isolation, the device, which Samsung calls a 3D stacked FET (3DSFET), will leak current. A key step to achieving that isolation was swapping an etching step involving wet chemicals with a new kind of dry etch. That led to an 80 percent boost in the yield of good devices. Like Intel, Samsung contacted the bottom of the device from beneath the silicon to save space. However, the Korean chipmaker differed from the American one by using a single nanosheet in each of the paired devices, instead of Intel’s three. According to its researchers, increasing the number of nanosheets will enhance the CFET’s performance. |
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