[nwiswell]

> I don’t see a fundamental reason why one couldn’t replace one ASML EUV machine with, say, 1000 e-beam machines and run them all in parallel.

Fab floorspace is also very expensive, nevermind that's not even close to a realistic price per system (the factory interface alone costs $100k+)

[mrtnmcc]

Could also do multiple parallel e-beams to a chip (within reason). This might amortize some of the cost.

[nwiswell]

Definitely, but it doesn't solve the reliability problem