[naasking]

For good telescope optics, we look for something like 1/4 - 1/6 wavelength tolerance, minimum. That's for optical wavelengths, but photolithography is in the UV range, so that's already stricter tolerance in absolute terms because of the shorter wavelength, but how does the tolerance in relative terms compare? Thanks for the info!

[voldacar]

Read up on the Zeiss optics that go into the ASML EUV machines. (or at least what is publicly available knowledge). It's truly insane