[nwiswell]

> Again, you have to manufacture and assemble all the components for the machine to work.

And, yet again: that is not the hard part.

The reason why ASML is the only company which sells EUV tools is because it is the only company which spent the tens of billions of dollars on developing the technology, not because it has magical manufacturing methods! There are many companies that build WFE tools. Nikon sells ArF excimer immersion litho tools, the manufacturing of which is similarly difficult. The thing that distinguishes EUV is the light source, the optical path, the non-transmissive optics, etc, and the difficulty of resolving all of the related technical challenges that introduces (pellicle heating, out of band flare, aberrations, Sn redeposition, resist outgassing, etc). Not the assembly.

If you work at ASML, you should know this. More specifically, you would not try to imply that the actual assembly requires 10nm precision. Are you an intern?