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Mostly these machines are assembled from a combination of proprietary parts manufactured using regular machine tools by contract manufacturers, and from sub-units purchased from specialist suppliers. For example: proprietary parts including optics, wafer chucks, process chambers, structural panels, etc are manufactured to spec by contractors. Pumps, valves, motion control boxes, wafer robots, loadports, servers, etc are all bought from suppliers. There's not really any magic. The materials used for the parts are sometimes exotic (e.g. single crystal silicon, single crystal quartz, yttria coating, PEEK, sapphire, etc), but the contract manufacturers use the same old boring machine tools that everyone does. |
I've read that it would take China at least 10 years to get to ASML's current level. It might not be magic but there must be a lot of unknowns when starting from scratch.