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by qwezxcrty
1288 days ago
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I'm working with (although rather superficially) a ASML PAS5500 KrF DUV stepper. Its control workstation is based on some kind of unix (I guess Solaris). The stepper is a tool that is too expensive to retire, and if routinely maintained, can remain operational and happily expose wafers for more than twenty years[1]. No surprise to see it contains some ancient (by consumer electronics standards) software. [1] https://www.asml.com/en/news/stories/2021/three-decades-of-p... Also, I used a HP 86142B optical spectrum analyzer last year, which runs HPUX. |
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