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by mike_hearn
1356 days ago
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The documentary spends a lot of time interviewing their head of R&D who is described as the 'mad professor', he talks extensively about the problem of the tin exploding onto the mirror and how he encountered that problem etc, so presumably he should count as someone doing R&D for real. |
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I have heard about "the 2 times lazered tin droplet to generate "enough" EUV light" already in an older ASML documentary (years ago).