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by nwiswell 1615 days ago
> needed for very heavy indivisible parts (not sure if this is commons for fabs)

It is not common. Semiconductor equipment is generally designed to be sent via air freight and assembled on site.

Some of the supporting operations (water and air purification plants, on-site chemical production, LN2 production, etc) may require some large parts but that's a case-by-case basis and probably avoidable.