China sabotaging ASML profit on to prevent decentralization of chip production from Taiwan and maintain leverage over the US in Taiwan sovereignty struggle.
The timing is so suspicious that it definitely gives weight to that. Like the other sub-poster said, stux'ing a fab to show leverage in a future chip race makes a lot of sense.
Reminds me of Chinese netizen conspiracy theory that US set fire to ASML / Prodrive warehouse in 2019 that delayed EUV delivery to SMIC long enough for Trump admin to pressure Dutch gov to cancel the contract. Plausible more US shenanigans or that PRC is fighting fire with fire. Literally. Conspiracy theories aside, hard to believe stuxnetting semi fabs isn't in the list of options.