[s0rce]

I'm guessing, though not 100% certain, that EUV uses mirrors and not lenses, although still could be based on glass substrates.

[frankchn]

Yeah EUV uses mirrors, which Zeiss also supplies: https://www.zeiss.com/semiconductor-manufacturing-technology....

There is an introductory PDF presentation from Zeiss about their product for EUVs: https://www.euvlitho.com/2019/P24.pdf