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by calaphos 1976 days ago
Cymer seems to only do DUV light sources, the EUV stuff is developed by Trumpf and Zeis in Germany.
1 comments
trynumber9 1976 days ago
"ASML San Diego is responsible for the R&D and manufacturing of EUV light sources for lithography systems. Cymer focuses on DUV light sources." From ASML's website.

ASML San Diego was part of their joint research before acquisition.

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