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by blp
2166 days ago
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https://nanohub.org/resources/18349/download/NikonovBeyondCM... Has nice models and details on post cmos, for the curious. The papers (nikonov and young) are excellent, though I think they underrate the back end scaling challenges. This is about replacing the low k dielectric in the backend, and makes sense if you consider that backend metal will move to W or Co. so long as this is CMP capable (maybe?) this makes sense. |
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