| > I wonder if you can make micro machines at this level? The MEMS thing. At this size range, though state-of-the-art MEMS (mechanical vibrating frequency filters for RF receivers in phones, accelerometers) can have sub-100nm dimensions, basic accelerometers, pressure sensors, and inkjet heads are absolutely doable. > Not with this PDK or process, no. MEMS processes are quite specialised. But yeah, this is the problem. Although ICs and MEMS devices are made with similar tools, MEMS usually needs processing steps that don't play nicely with the steps in an IC process (e.g., etching away huge amounts of silicon to leave gaps and topography, or using processing temperatures and materials that mess up ICs). This SkyWater process cannot do MEMS. A more general problem is that different MEMS devices often need different incompatible process steps, so a standardized process is infeasible (though http://memscap.com/products/mumps/polymumps tries). However, there is a tiny chance that, if we get enough detail on the process steps and leeway in the design rules, a custom layout could implement a rudimentary accelerometer or something that works after post-processing (say, a dangerous HF bath), but only with intimate knowledge of said process steps (e.g., internal material stress levels) and a lot of luck. |