[terminado]

Geeze, I though you needed a clean room to do this kind of work. I guess, being a hobby, with less concern for effort, loss of product, or cost versus profit, one might summon the will to try, try again, when confronted with botched fabrication runs.

Even with millimeter-scale components, I'd still think dust and debris could be a real problem. Is it just that 12 hour runs are short enough to just accept an imperfect production output, since it's a personal project, or is dust not as big a deal at this scale as I'd imagine?

[AstralStorm]

You do not need a cleanroom, just some laminar airflow to prevent dust contamination. That is easy to achieve with a bunch of fans and lab clothing.

Static electricity damage is prevented by grounding everything. (Important during lithography.)

The hard part is getting a reliable plasma oven and the requisite chemicals plus running the process to reliability.

[anfilt]

The smaller you go the more worried you should be about dust, and particles. Also the more layers to your process. Also no mention of yield.