[forbin_meet_hal]

"Extreme Ultraviolet Lithography..."

Because saying "We're using x-rays" just sounds too scary right now...

[mikeyouse]

I doubt that has anything to do with it.. Probably due to the 15nm wavelength they're using and a <10nm wavelength being the typical cutoff for x-ray.

[e2e8]

https://en.wikipedia.org/wiki/Extreme_ultraviolet