For the digital people, building a ring oscillator with N stages will cause the output to divide by N, and just make sure that f/N is in the range of your oscilloscope.
To actually measure things up in the THz range directly, there are more exotic methods: Superconducting bolometer is one that I've been involved with. But those are a PITA for a bunch of reasons.
The usual schtick is to measure the S-parameters a slower speeds and extrapolate out to the cutoff. (see chart 21 from the link above: http://www.ece.ucsb.edu/Faculty/rodwell/publications_and_pre...)
For the digital people, building a ring oscillator with N stages will cause the output to divide by N, and just make sure that f/N is in the range of your oscilloscope.
To actually measure things up in the THz range directly, there are more exotic methods: Superconducting bolometer is one that I've been involved with. But those are a PITA for a bunch of reasons.