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by nmz787
3680 days ago
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I do part time work packaging FIBbed gizmos, the 'machinist' has done at best a 50nm diameter aperture in metal film (from what I recall, maybe it was 100nm) using a beam diameter of 10nm. This is on a machine that was new 20 years ago (newer machines are probably 5 to 10X better in terms of hardware these days, maybe 50X in software). Also, ASML is researching multi-beam electron steppers and getting more traction lately: http://semiengineering.com/multi-beam-market-heats-up/ (from 2 months ago) |
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I always see articles on the ebeams and FIB showing how they work. Nothing on packaging.